We are able to provide upgrade and conversion packages to update your current installed base capabilities for almost any type of Lam tool. This can be done to suit your needs either onsite, insitu, or at our dedicated facility. We can also offer various options for risk management by offering fixed price packages.

Our staff have extensive experience of the full range of available upgrade types. For example:

• Classic to Envision User Interface Upgrade
• Mechanical Clamp to Electrostatic Chuck (ESC)
• SMIF Load Port to Open Cassette Hine Indexer (or vice-versa)
• Manual tune to Low Frequency Autotune (LoFAT)
• Off-Board to On-Board RF Generator

We also have the capability to provide more extensive non standard changes to system type, enabling asset life to be extended. For example:

• Rainbow 4720 (tungsten etch) to Rainbow 4420 (poly etch)
• Rainbow 4600 (metal etch) to Rainbow 4400 (poly etch)
• Rainbow 4500 to Rainbow 4520 (high conductance manifold)
• Rainbow 4520 to 4520XLe (deep submicron capability upgrade)
• Rainbow 4520 to Rainbow 4520i (isotropic chamber upgrade)
• TCP9400SE to TCP9400PTX
• TCP9600 to TCP9600SE (variable to fixed gap upgrade)

Note- The following are all trademarks of Lam Research Corporation: Rainbow 4420, Rainbow 4520, Rainbow 4600, 4520XLe, TCP9600, TCP9400, Alliance, Autoetch