Our experienced staff can provide process development, integration and qualification support for plasma etch applications.

We can demonstrate broad application experience across the etching of oxide, silicon, metal, nitride, tungsten and various other materials.

Our packaged services include:

• Equipment Start-up / Qualification
• In-House training (for etch applications or process integration)
• Application specific (e.g. contact, gate, trench)
• Device and process integration technology
• Optimization Programmes:
  • Throughput, Yield, CoO, MTBC, Uptime, Process Integration